TR IBOLO GY Sep, 1998 ( ) ( ) C C , , TH [1 5 ].

Transcript

1 18 3 V o l 18, N o TR IBOLO GY Sep, 1998 ( ) ( ) ( ) ( ) C C,, ,. X,. :,. TH (DL C), [1 5 ]. [6 9 ],. 1993, [10 12 ]. [13 ], C C ( sp 3 ).,.., , g, :., 26,,, 5., 30,,,, 10., 67,,,, 50., 32,,, 20., 34,,,, 30.

2 [14 ],.,,,. (A r) h,, 1 5 Λm. ( 1 N, 15 s). (SEM ) X #,, 9. 8 N N, cm.,,, , R a Λm, Λm,...,,,. 1 (a) M o rpho logy of DL C film sythesized from po lym er at the temperature of (b) M o rpho logy of the DL C film after beig etched w ith atom ic hydroge fo r 0. 5 h F ig 1 SEM mo rpho logy of DL C film s 1 SEM m i SEM.,.,., CVD [15 ] X, cm cm - 1 2

3 3 : 195., cm - 1 1, cm ( G ) cm - 1 (D ) cm G cm cm - 1, G cm - 1 (sp 3 ) (D ), cm cm - 1 D. 3 X. 3 (1 1 1) (2 2 0). (A r), 2. F ig 2 R am a spectrum of DL C film sythesized, 400, from po lym er at the temperature of sp 3 C C [8, 10 ] ;,, sp 3, sp 3, sp 2, C C F ig 3 X2ray diffractio spectrum of DL C film sythe2 sized from po lym er at the temperature of X sp 3.,, sp 3., sp 3 sp 2,, GPa.,. W ittlig [16 ],,,. ( 13 GPa, ),. 1

4 h 45 #. :. 1 Table 1 The tr ibolog ical properties of DLC f ilm s Samp les p gn F rictio coefficiet W ear rateg10-6 mm 3 (Nm ) - 1 DL C2Si3N Si3N DLC2Si3N Si3N (sp 3 ) (sp 2 ).,,.,,. 3 a., C C.. b.,. 1 M attew s A, E sk ildse S S. Egieerig app licatio fo r diamod like carbo. D iamod ad Related M aterials, 1994, 3: H irokazu N akaue, T sutom u M itai, H ideo Kurokaw a. A pp licatio of diamod like carbo film s to the p ro tective layer of o rgaic pho tocoducto rṡ ad Related M aterials, Tokyo, P roceedig of 2d Iteratioal Coferece o the A pp licatios of D iamod F ilm s 3,,.., 1995, 15 (2) : A dreyev V D, Sem eovich V A, To rishiy V Z. P roductio of dielectric ad sem icoductig diamod like film s. Surf Coat T echo l, 1992, 50: T sai H siao2chu, Bogy D B. Characterizatio of diamod like carbo film s ad their app licatio as overcoats o th i2 film m edia fo r m agetic reco rdig. J V ac Sci T echo l, 1987, A 5 (6) : V oevodi A A, L aube S J P, W alck S D. Pulsed laser depo sitio of diamod like amo rphous carbo film from graph ite ad po lycarbo targets. J A pp l Phys, 1995, 78 (6) : A gus J C, Stultz J E, Sh iller P J. Compo sitio ad p roperties of the so2called diamod2like amo rphous carbo film s. T h i So lid F ilm s, 1984, 118: M ako to Kitabatake, Kiyo takaw asa. Grow th of diamod at room temperature by a io2beam sputter depo sitio u2 der hydroge2io bom bardm eṫ J A pp l Phys, 1985, 58 (4) : Kyu Chag Park, Jog hyu M oo, J i Jag. D epo sitio of hydroge2free diamod like carbo by p lasm a ehaced chem ical vapo r depo sitio. A pp l Phys L ett, 1996, 68 (25) :

5 3 : V isscher G T, B iacoi P A. Sythesis ad characterizatio of po lycarbyes, a ew class of carbo2based etwo rk po lym ers. J Am Chem Soc, 1994, 116: V isscher G T, N estig D C, Baddig J V et a l. Po ly (pheylcarbye) : A po lym er p recurso r to diamod like carbo. Siciece, 1993, 260: Su Z, Zheg Z, Su Y et a l. IR spectral ivestigatio of the pyro lysis of po lym er p recurso r to diamod like carbo. Surf Coat T echo l, 1996, 79: Ece M, O ral B, Patscheider J et a l. Effect of o rgaic p recurso r o diamod ucleatio o silico. D iamod ad Re2 lated M aterials, 1995, 4: Zheg Z, Su Z, Yag Q et a l. Sythesis of diamod like carbo film s from po lym eṙ SP IE, 1994, 2364: Su Z, Zheg Z, Su Y et a l. N ucleatio ehacem et of diamod usig diamod like carbo film sythesized from po lym er as a iterm ediate layer. T h i So lid F ilm s, 1995, 257: W ittlig M, Bedavid A, M arti P J et a l. Ifluece of th ickess ad substrate o the hardess ad defo rm atio of T in film s. T h i So lid F ilm s, 1995, 270: Study of Structure ad Tr ibolog ica l Properties of D iam od L ike Carbo Sy thesized from Polym er Che J igsheg (D ep artm et of M od er P hy sics L az hou U iversity L az hou Ch ia) W ag Xueju Zheg Zh ihao Su Zhuo (D ep artm et of P hy sics E ast Ch ia N orm al U iversity S hag hai Ch ia) Ya Fegyua (L aboratory of S olid L ubricatio L az hou Istitu te of Chem ical P hy sics the Ch iese A cad em y of S cieces L az hou Ch ia) Abstract A ew k id of carbo2based radom etw o rk po lym er, po ly (pheylcarbye), w as sy thesized. T he po lym er coatig o Si3N 4 sub strate w as coverted to diamod like carbo (DL C) at atmo spheric p ressu re after beig heat2treated at the temperatu re of Sca ig electro m icro scope (SEM ), R am a spectrom eter ad X2ray diffrac2 tom eter w ere emp loyed to characterize the su rface mo rpho logy ad structu re of the DL C film. T he tribo logical p roperties of the DL C film w ere ivestigated. T he resu lts show that the DL C film co sists of diamod crystals ad graph ite ad po ssesses h igh hardess, low frictio coefficie t, ad good a tiw ear p roperty. Key words po ly (pheylcarbye) pyro lysis diamod like carbo tribo logical p rop2 ert ies Cla ssify ig um ber TH