Coupled ana lytical and boundary elem en t m ethod for 3-D in terconnecting res istance ca lcula tion s FEM BEM. FDM FEM,

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ISSN 100020054 CN 1122223gN ( ) J T singhua U niv (Sci & Tech), 2004 44 9 2004, V o l. 44, N o. 9 32g36 127721281,, (, 100084) :,,,,,, R aphael, 2 3, 0. 1% 1%, R aphael, : ; ; ; ; : TN 47 : 100020054 (2004) 0921277205 : A Coupled ana lytical and boundary elem en t m ethod for 3-D in terconnecting res istance ca lcula tion s WANG Xiren, YU W enjia n, WANG Zeyi (D epartmen t of Computer Sc ience and Technology, Tsinghua Un iversity, Be ij ing 100084, China) Abstract: D eep subm icron p rocessing techno logy is w idely used, but the interconnecting structures are becom ing very comp lex so resistance calculations based on two2dim ensional models can no longer p rovide sufficiently accurate results. This paper p resents a three2dim ensional resistance calculation m ethod, called the com bined analytical and boundary elem ent m ethod. The m ethod cuts selected interconnecting lines, then calculates the resistances of straigh t sections using analytical fo rm ula and the resistances of mo re comp lex sections w ith comp lex interconnections using the imp roved BEM. T he resistances of the separate subregions are com bined to calculate the resistance of the entire region. Experim ents on actual layouts show that compared w ith the comm ercial Raphael algorithm, the p ropo sed m ethod is 2 3 o rders of m agnitude faster, uses m uch less m emo ry (about 0. 1% to 1% ), and is more accurate than Raphael w ith default m esh partitions. The results illustrate that the coup ling m ethod used in the algo rithm is efficient and accurate. Key words: very large scale integration; interconnecting resistance; 32D extraction; analytical and boundary elem ent m ethods; coup ling,, (VL S I) [1 ],,, [2 ], [1 ], [3, 4 ], [5 ], 5 GH z, ; [6 ], ( FDM ) [7 ] ( FEM ) [8 ] (BEM ) [2, 6 ] L ap lace FDM FEM, [2, 5, 6 ],,,,, [ 9 ], FDM [ 10 ], FEM,,,,, ;, BEM ;, : 2003206209 : (2002AA 1Z1460SOC) : (19782), ( ),, :,, E2m ail: w angzy@ tsinghua. edu. cn

1278 ( ) 2004, 44 (9), BEM, ( ), 1,, (via), 1 IBM [1 ], 8,, [ 2, 6, 9, 10 ] 1 IBM 2 2. 1, R = Θlgs, (1) : Θ, l, S, 2, j ( ) V j= 1, V k= 0 (k j ), j k R jk = V jk = V j - V k = 1, (2) I k I k I k I k k, I k = Ρ 9u 9n # k d#, (3) : # k k, Ρ, u, n [6 ], 2. 3,, L ap lace [6 ] 9 2 u 9x 2 + 92 u 9y 2 + 92 u 9z 2 = 0, (4), u L ap lace Green (4) [6 ] csu s + # q3 ud# = # u 3 qd#, (5) : q 9ug9n, u 3 L ap lace, q 3 9u 3 g9n, #,, A x = f, (6) : x q u (6), (3) (2) 3,,,, B EM, 3. 1 [ 11 ],,, 2, E1 E2, FUL L,, 2. 2,,,, 3, d,, d = 0. 5w (w, 3 P 1

, : 1279 ),, ;,,,, d, 2d;,,, 3a, P 1, P 2 P 8 P 1 P 2 P 3 P 4 P 1, P 5 P 1, P 6 P 7, P 8 P 1 d 0. 5 P 1 (), L 1< 2d, L 2 2d, FULL 3b P 2 P 3 P 4 2d, P 1, N 1; P 5 P 6 P 7 N 3 P 8 P 1, d, N 5P 1 N 1 N 3 N 5, N 2 N 4 3 3. 2 3, N 2 N 4, N 1 P 2 P 3 P 4, N 3 P 5 P 6 P 7, N 5 P 8,,,, 4,,, 4 3. 3 3. 3. 1, (1),, 3. 3. 2 BEM, BEM, 1),,,,, (4 ),,,, BEM,, 2),, ;,, u q, (), 5, 1 2 B,, 5B

1280 ( ) 2004, 44 (9) 3. 4 G i, ( ), R j, G i R j G i G ϖ ( 6), G 6( 4) 1), 1V,, 0V ; 2) N s, G ϖ, N s ; 3) N c i G i, n i, n λ i, G i n λ i (6 ), n i (n i- 1) g2 G i,, n λ i+ n i (n i- 1) g2; 4) G ϖ N s, N s ( ), 1) ; 5) G ϖ G i,, K irchhoff ;, n λ i+ n i (n i- 1) g2, 3) ; 6) 4) 5), ; 7),, I k, (2) 8) 1),, 2) 7), G BEM, 3. 5 1) FUL L,, 3) B EM 4), 3. 4 4, 1. 83 Λm 2. 67 Λm 1. 50 Λm 10. 33 Λm 9. 55 Λm 8. 45 Λm, 2 3, ( B EM ) R ap hael (2000. 2, FDM 2) 1 ) S un U ltra E n terp rise 450, 248M H z, 1 2, ; R ap hael, (R ap hael 2 ) ; 11 M B s % 186 0. 10 0. 51 0. 78 1. 00 BEM 870 4. 71 4. 68 6. 75 9. 18 R aphael 63 168 21. 00 101. 73 1. 05 199. 47 22 M B s % 733 0. 13 2. 38-0. 65 1. 00 BEM 3 855 8. 22 128. 53 7. 31 54. 00 R aphael 336 398 89. 00 6 118. 76 1. 58 2 570. 91 1 2,,, R aphael ;, BEM,, 6% 0. 8%, R aphael, 2

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