LiNbO 3, , LiNbO 3. , 50 nj. 2 mm 2 mm. . SU28 [14 ],Polymer [15 ] (LiNbO 3 ) Ti : Sapphire Hz, PACC: 4255R, 4262A, 4265

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1 Π2007Π56 (10) Π ACTA PHYSICA SINICA Vol 56,No 10,October,2007 ν 2007 Chin Phys Soc 3 g (,, ) ( ; ),,,, 2 m 170 nj, 400 nm, 100 nj, nm, 200 nm,, :,,, PACC: 4255R, 4262A, mm 2 mm, [1 9 ],, [10,11 ] [12 ] [13 ], SU28 [14 ],Polymer [15 ],, ( ),, 50 nj 300 mπs 5 m 21, 1, Ti : Sapphire 50 5 fs, 800 nm, [16,17 ], 1000 Hz, 0 2 mj,, [18 21 ],, , Zhou, D 740 nm,114 ( NA ( numerical aperture) : D = 640 nm) 112 m [18 ] 1 22 NA,, 2 m X Y 3 ( : ) ( : ) g E2mail : hust edu cn

2 m, Z 1 m z, 10 mm 5 mm 015 mm, 1650, 4170 gπcm 3, CCD 3111, CCD 31, 2 (SEM) 3, 60 nj,, 60 nj, 60 nj 3 (a), (b),,,, 470 nj ( 3 (c) ), 170 nj, 400 nm( 3 (f) ), nj,, 720 nm, 60 nm SEM,, ,470,230,180,100,60 50 nj,, , 4,8,17,33,67,125,250,500, (a) 3175 J ; (b) 1188 J ; (c) 470 nj ; (d) 350 nj ; (e) 230 nj ; (f) 170 nj

3 10 : nj, SEM 5 6, 320 nm,, 6 (c), (d), (g), (h),, 200 nm, Shimotsuma [22 ],, KTP [23 ] [24 MgAl 2 O ] 3,, nj,17, 800 nm, 5 SEM 6 SEM (a) 470 nj,1000 ; (b) 100 nj,1000 ; (c) 60 nj,1000 ; (d) 50 nj, 1000 ; (e) 100 nj,4 ; (f) 100 nj,17 ; (g) 60 nj,33 ; (h) 50 nj,67

4 nj, nj 300 mπs 5 m, 112 m, 2 mm 2 mm, 8 (a) CCD, 8 (b) 632 nm He2Ne, 8 (c), (d) SEM 800 nm, 8 CCD SEM (a) CCD ; (b) ; (c) SEM ; (d) SEM 3141,,,,,,,,, [25,26 ],, 9

5 10 : 5825 [14,15,27 ], ; 2 Π2 < r < 1 Π2, k,, [28 ], ; 3 Π2 < r <, 9 2 Π2, 3 4,,, 6 (c), (d), (g),(h),,,,, 10, fs 800 nm ( r < 1 Π2), 1000 Hz,, 10,,, 2 m 470 nj,, 170 nj 400 nm,100 nj nm, 50 nj m,, 200 nm,,, [1] Jonas B,Christian G, Stefan N, Andreas T 2006 Appl Phys Lett [2] Saliminia A, Nguyen N T, Chin S L, Vallee R 2004 Opt Commun [3] Chen B, Yu B K, Yan X N, Qiu J R, Jiang X W, Zhu C S 2004 Chin Phys [4] Sikorski Y, Rablau C, Dugan M, Said A A, Bado P, Beholz L G 2006 Appl Opt [5] Schaffer C B, Jamison A O, Mazur E 2004 Appl Phys Lett [6] Chen J W,Huser T R, Risbud S H, Hayden J S, Krol D M 2003 Appl Phys Lett [7] Li H Y, Hyungson K 2006 J Appl Phys [8 ] Li H Y, Jie W Q, Zhang S A, Sun Z R, Xu K W 2006 Chin Phys [9 ] Li C B,Jia T Q, Sun H Y,Li X X,Xu S Z,Feng D H,Wang X F, Ge X C, Xu Z Z 2006 Acta Phys Sin (in Chinese) [ ] [10] Efimov O M, Glebov L B, Richardson K A,Stryland E V,Cardinal T,Park S H,Couzi M, Bruneel J L 2001 Opt Mater [11] Hirao K, Miura K 1998 J Non2Crystalline Solids [12] Fukuda T, Ishikawa S, Fujii T, Sakuma K, Hosoya H 2004 Proc of S PIE [13] Qiu J R, Mitsuru S, Takayuki N, Si J H, Jiang X W, Zhu C S, Kazuyuki H 2002 Appl Phys Lett

6 [14] Teh W H, D rig U,Salis G, Harbers R, Drechsler U, Mahrt R F, Smith C G, G ntherodt H J 2004 Appl Phys Lett [15] Liguda C, Bottger G, Kuligk A, Eich M, Roth H, Kunert J, Morgenroth W, Elsner H, Meyer H G 2001 Appl Phys Lett [16] Busacca A C,Sones C L,Apostolopoulos V, Eason R W, Mallis S 2002 Appl Phys Lett [17] Robert W E, Alexander J B, Sakellaris M, Peter G R S 2001 Opt Commun [18] Zhou G Y, Gu M 2005 Appl Phys Lett [19] Jonas B,Christian G,Stefan N, Andreas T 2006 Appl Phys Lett [20] Wu Q, Xu J J, Zhang GQ,Zhao L J,Zhang X Z,Qiao HJ,Sun Q, Lu W Q,Zhang G Y, Volk R T 2003 Opt Mater [21] Zhou G Y, Gu M 2006 Opt Lett [22] Shimotsuma Y, Kazansky P G, Qiu J R, Hirao K2003 Phys Rev Lett [23] Li Y H, Lu P X, Dai N L,Long H,Wang Y, Yu B H 2006 Appl Surf Sci [24] Yu B H,Dai N L,Li Y H, Zheng Q G, Lu P X 2007 J Inorg Mater ( in Chinese) [ ] [25] Deng Y P,Jia T Q,Leng Y X,Lu H H,Li R X, Xu Z Z 2004 Acta Phys Sin (in Chinese) [ ] [26] Li X X,Jia T Q,Feng D H, Xu Z Z 2004 Acta Phys Sin (in Chinese) [ ] [27] Sun H B, Kawata S 2003 J Lightwave Tech [28] Ma L, Shi S X, Cheng G H, Zhao W, Chen G F 2006 Proc of SPIE Morphology and mechanism of femto second la ser2induced structural change s in lithium niobate crystal 3 Yu Ben2Hai Dai Neng2Li Wang Ying Li Yu2Hua Ji Ling2Ling Zheng Qi2Guang Lu Pei2Xiang g ( Wuhan National Laboratory for Optoelectronics and College of Optoelectronics Science & Engineering, Huazhong University of Science and Technology, Wuhan , China) (Received 4 January 2007 ; revised manuscript received 4 February 2007) Abstract The morphology and mechanism of lithium niobate ( ) crystal ablated by a femtosecond laser pulse have been studied The ablated spots and surface diffraction grating have been examined by means of scanning electron microscopy ( SEM) and atom force microscopy ( AFM) Sub2diffraction limit spots in crystal ablated by femtosecond laser have been obtained The diameters of ablation spots are 400 nm and 800 nm when 170 nj single pulse and 100 nj 17 pulses are used, respectively There are ripples with about 200 nm periodic on the bottom surfaces of the spots at low laser energy The result shows that the sub2diffraction limit structures may be formed by the multi2photon excitation, and the femtosecond laser ablation is an innovative tool for manufacturing 2based optical devices Keywords : femtosecond laser, lithium niobate crystal, diffraction limit, ablation threshold PACC: 4255R, 4262A, Project supported by the National Natural Science Foundation of China ( Grant No ) and the Specialized Research Fund for the Doctoral Program of Higher Education, China ( Grant No ) g Corresponding author E2mail : hust edu cn