Strengths and Facts Advanced Facilities and Quality Production Cleanroom: Equipment: Characterization Lab: Reliability Lab: Failure Analysis Lab:

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2 About MacMic MacMic Science & Technology Holding Co., Ltd. is a high-tech company consisting of scientists and engineers with expertise of power electronics and engaged in development and production of power semiconductor products at home and abroad. We provide customers with the best cost performance products. Our well-equipped manufacture and testing facilities and our skilled workers enable us to supply high quality and reliability products. Our fast and flexible ability to meet customer s demands highlights our business uniqueness as a great value to customer s competitive advantages. Strengths and Facts Certified National Key Hi-Tech Enterprise National Hi-Tech Industrialization Demonstration ase Drafter of National Standard for IGT and FRD Engineering Research Center for New Type of High Frequency Power Semiconductor Devices 38 Chinese Patents and 3 International Patents Awarded Advanced Facilities and Quality Production Cleanroom: Space 1,000m 2 Cleanliness Class 10K for Overall, 1K for Locals Equipment: Void-Free Vacuum Solder High Speed Pick & Place Die Attachment System Ribbon / Wire onder X-Ray Void Scanner Characterization Lab: Diode Reverse Recovery Tester IGT DC Parameter Tester IGT Switching Parameter Tester IGT Charge Tester IGT Short Circuit Tester SCR Static & Dynamic Parameter Tester Power Semiconductor UIS Tester Power Semiconductor Surge Current Tester Power Semiconductor Transient Thermal Resistance Tester Reliability Lab: High Temperature Reverse ias High Temperature Gate ias 85 / 85 Temperature / Humidity Test High / Low Temperature Cycle Power Cycle Failure Analysis Lab: X-Ray Scanning Cross-Section Analysis Hot Spot Analysis 1000X Microscope Inspection 01

3 Product Portfolio chips, discretes, and a variety of power modules. MacMic products have been widely used in applications from SMPS, MacMic designs, manufactures, markets, and sells energy-efficient power semiconductors devices ranging from Uninterrupted Power Supply, Power Factor Correction, Motor Drive, Welder, Renewable Energy System, etc. Chips Power Range : V / 1-200A Category : Fast Recovery Epitaxial Diode ( FRED ) Chips Features : Very Short Recovery Time Soft Recovery Characteristic Low Reverse Recovery Charge Low Leakage Current Avalanche Energy Rated Discretes Power Range : V / 8-60A Category : Fast Recovery Epitaxial Diode ( FRED ) Discretes Package : TO-220, TO-220F TO-247, TO-3P Category : IGT Discretes Package : TO-247, TO-264 Modules Power Range : V / A Category : IGT Modules Fast Recovery Epitaxial Diode ( FRED ) Modules Thyristor ( SCR ) Modules 02

4 Advanced Production Facilities MacMic strives to provide top quality and performance power modules to customers with long term committing to using the best materials and implement the strictest quality control by the experienced and well-trained production team. To further fulfill customer s demands, we utilize state-of-the-art manufacture facilities that help MacMic products with gaining better customer satisfaction in more consistent quality and shorter lead time. Solder Printed DC High Speed Pick & Place Die Attachment Void Free Vacuum Soldering Finished Products Final Testing 03

5 Advanced Production Facilities We have high performance Void-Free Vacuum furnace which gives our products better thermal features than others. Our industry leading Wire onder is capable of onducting various bonding mechanism either with heavy duty Ribbon-ond or with conventional Wire-ond on chips depending on customer s applications. MacMic is proud of presenting the advanced manufacture facilities and production management. We will work hard to demonstrate our ability of continually providing best price-performance products to our customers. X-Ray Void Inspection Auto Wire / Ribbon onding Pull & Shear Testing Appearance Treatment Gel Potting Case Marking & Sealing 04

6 FRED Chips POWER RANGES V 1-200A Very Fast T rr and Soft Recovery Low Forward Voltage Drop (V f ) Low Leakage Current Avalanche Energy Rated Available Al or Ag Top Metal Power Factor Correction Freewheeling Snubber Converter, Chopper & ooster Circuits Switching Power & UPS T C =25 o C unless otherwise noted V RRM I F(AV) Duty=0.5 T C = 110 C V F I F = I F(AV) T J =125 C t rr I F =1A T J =25 C (ns) Die Size (mm) Die Size (mil) MM01A100A x S MM01A2A2G x S MM01A6A x S MM01A x S MM01A8A x S MM0110A2U x S MM0120A2U x x 189 MM01A100A x S MG01A12AC x x S MG01A16AC x x S MG01A19AC x x S MG01A20CC x x S MM01A20CC x x S MM01D4A x S MM01D x S MM01D8A4U x S MM01D8A x S MM01D15A x S MM01D15A4U x S MM0120A x x 189 MM01D30A x x MM01D60A x S MG01D20AC x x S MM01J75A x S MM01D1A x S MM01D4A x S MM01D86U x S MM01D86 MM01D8A6 MM01D10A6U MM01D10A x x x x S 84.6S 94.5S 94.5S 05

7 FRED Chips POWER RANGES V 1-200A Very Fast T rr and Soft Recovery Low Forward Voltage Drop (V f ) Low Leakage Current Avalanche Energy Rated Available Al or Ag Top Metal Power Factor Correction Freewheeling Snubber Converter, Chopper & ooster Circuits Switching Power & UPS o T C =25 C unless otherwise noted V RRM I F(AV) Duty=0.5 T C = 110 C V F I F = I F(AV) T J =125 C t rr I F =1A T J =25 C (ns) Die Size (mm) Die Size (mil) MM01D15A6 MM01D15A6U MM01D30A6 MM01D30A6U MM01D60A6 MM01J75A6 MM01D120A6 MG01J200A6 MM01D200A x x x x x x x x x S 118.1S x x S 259.9S x S MM01D8A6U x S MM01D8A7U x S MM01D87U x S MM01J75A x S MG01J200A x S MM01J75A x S MM01J10A12U x S MM01J15A12U x S MM01J20A12U x S MM01J30A x S MM01J30A12U x S MM01J60A x x MM01J75A x S MM01J100A x x MM01N75A x S MM01N100A x x

8 FRED Discretes POWER RANGES V Short Recovery Time Low Reverse Recovery Charge Avalanche Energy Rated Welding Machine Home Appliances 8-60A Soft-Recovery Characteristics Low Leakage Current SMPS, UPS PFC T C =25 o C unless otherwise noted Package Style Inside Circuit V RRM I F(AV) Duty=0.5 T C = 110 C V F I F = I F(AV) =125 C T J t rr I F =1A T J=25 C (ns) R θjc Per Chip ( C/W) TO-220 TO-220 TO-220F TO-3P TO-3P TO-247 C U U C U U MM16F020KC x MM16FU060KC 8 x MM8F060K MM8FU060K MM15F060K MM30F060K MM10F120K MM10FU120K MM15FU120K MM20FU120K MM30F120K MM30FU120K MM15F060K MM30FU060K MM10FU120K1 MM15FU120K D x MM30FU020PC x MM60F020PC x MM60FU030PC x MM x MM30F040PC x MM80FU040PC x MM30F060PC MM30FU060PC 15 x 2 15 x MM60F060PC 30 x MM60FU060PC 30 x MM30F040P MM30F060P MM30FU060P MM60F060P MM60F MM30F MM30FU MM60F

9 FRED Modules POWER RANGES V Short Recovery Time Low Reverse Recovery Charge Avalanche Energy Rated Welding Machine Inverter, Chopper A Soft-Recovery Characteristics Low Forward Voltage Stressless Package SMPS, UPS PFC T C =25 o C unless otherwise noted Package Style Inside Circuit V RRM I F(AV) Duty=0.5 T C = 110 C I FSM t=10ms T J =45 C V I F T J =125 C t rr T J =25 C (ns) R θjc ( C/W) FJ 38X28.1X12.8mm FZ 93X20X17mm FN 94X26X17mm FY 92X27X17mm D U DK1 DA DK DK1 MMF2X100J040D x MMF2X100J060D 100 x MMF2X60J070D x MMF2X60J120D x MMF2X100J120D x MMF100J170U MMF400Z010DK x MMF400Z020DK x MMF200Z040DK x MMF200Z040DK x MMF200Z060DK1 100 x MMF150N x MMF100N x MMF300N060DA6 150 x MMF200N070DA x MMF200N090DA x MMF200N120DA x MMF200N120DA x MMF300N060DK6 150 x MMF200N070DK x MMF200N090DK x MMF200N120DK x MMF200N120DK x MMF400Y010DK x MMF1000Y010DK x MMF800Y020DK x MMF200Y040DK x MMF300Y040DK x MMF400Y040DK x MMF200Y060DK1 100 x MMF300Y060DK1 150 x MMF300Y050U FY 80X42X22mm U MMF300Y070U

10 FRED Modules POWER RANGES V Short Recovery Time Low Reverse Recovery Charge Avalanche Energy Rated Welding Machine Inverter, Chopper A Soft-Recovery Characteristics Low Forward Voltage Stressless Package SMPS, UPS PFC T C =25 o C unless otherwise noted Package Style Inside Circuit V RRM I F(AV) Duty=0.5 T C = 110 C I FSM t=10ms T J =45 C V I F T J =125 C t rr T J =25 C (ns) R θjc ( C/W) FS 94X34X30.5mm DK DK2 U MMF150S060DK 150 x MMF200S060DK 200 x MMF300S060DK 300 x MMF150S120DK x MMF200S120DK x MMF300S120DK x MMF100S170DK x MMF200S170DK x MMF400S040DK x MMF150S060DK2 150 x MMF200S060DK2 200 x MMF300S060DK2 300 x MMF150S120DK x MMF200S120DK x MMF300S120DK x MMF100S170DK x MMF200S170DK x MMF300S060U MMFS060U MMF300S120U MMF400S120U MMFS120U MMF400S170U MMF400D x MMF300D x MMFD x FD 108X62X30.5mm 1 2 MMF300D x MMF400D x MMF300D x MMF400D x

11 FRED Modules POWER RANGES V Short Recovery Time Low Reverse Recovery Charge Avalanche Energy Rated Welding Machine Inverter, Chopper A Soft-Recovery Characteristics Low Forward Voltage Stressless Package SMPS, UPS PFC o T C =25 C unless otherwise noted Package Style Inside Circuit V RRM I F(AV) Duty=0.5 T C = 110 C I FSM t=10ms T J =45 C V I F T J =125 C t rr T J =25 C (ns) R θjc ( C/W) FS 94X34X30.5mm 2 DA DA2 MMF150S x MMF200S x MMF300S x MMF150S x MMF200S x MMF300S x MMF100S x MMF200S x MMF150S x MMF200S x MMF300S x MMF150S x MMF200S x MMF300S x MMF100S x MMF200S x MMF150S060DA 150 x MMF200S060DA 200 x MMF300S060DA 300 x MMF150S120DA x MMF200S120DA x MMF300S120DA x MMF100S170DA x MMF200S170DA x MMF150S060DA2 150 x MMF200S060DA2 200 x MMF300S060DA2 300 x MMF150S120DA x MMF200S120DA x MMF300S120DA x MMF100S170DA x MMF200S170DA x

12 IGT Discretes POWER RANGES V Fast Switching Speed Low Tail Current Welder & Plasma Cutter Induction Heating UPS and SMPS Soft Turn-off Performance Short Circuit Capability Motor Drive Renewable Energy Inverter T C =25 o C unless otherwise noted Package Style Inside Circuit VCES min. IC TC=80100 C VCE(sat) typ. P D max. Eoff TJ=125 C Rθjc max. (W) (mj) ( C/W) MM25G MM30G TO-247 MM60G MM40G120L TO-264 MM50G120L

13 IGT Modules POWER RANGES V Fast Switching Speed Soft Turn-Off Characteristic Welding Machine, Cutting Machine SMPS, UPS, Inverter, Chopper EV A Low Conduction Loss High Short Circuit Capability Plating Power Supply, Induction Heating Solar, Wind Power Servo Drive, Switched Reluctance Drive T C =25 o C unless otherwise noted Package Style Inside Circuit V CES min. I C T C =80 C V CE(sat) typ. P D max. (W) E off T J =125 C (mj) R θjc max. (K/W) GJ 38X28.1X12.8mm GA 93X21X30.4mm GS 94X34X30.5mm U UZ MMG100J060U MMG50J120U MMG75J120U MMG75J120U6HN MMG50J120UZ MMG75J120UZ MMG100J120UZ MMG40A1206C MMG40A1207HN MMG50A1206C MMG50A1207HN MMG75A1206C MMG75A1207HN MMG75S0606EN MMG75S0606R MMG100S0606EN MMG100S0606R MMG100SR MMG150S0606EN MMG150S0606R MMG200S0606EN MMG200S0606R MMG50S1206HN MMG50S1206TN MMG50SR MMG75S1206C MMG75S1206HN MMG75S1206TN MMG75SR MMG100S1206C MMG100S1206HN MMG100S1206TN MMG100SR MMG150S1206TN MMG150SR

14 IGT Modules POWER RANGES V Fast Switching Speed Soft Turn-Off Characteristic Welding Machine, Cutting Machine SMPS, UPS, Inverter, Chopper EV A Low Conduction Loss High Short Circuit Capability Plating Power Supply, Induction Heating Solar, Wind Power Servo Drive, Switched Reluctance Drive T C =25 o C unless otherwise noted Package Style Inside Circuit V CES min. I C T C =80 C V CE(sat) typ. P D max. (W) E off T J =125 C (mj) R θjc max. (K/W) GS 94X34X30.5mm GQ 92X45X29.8mm FZ UA UZA UK UZK DE MMG50S1706EN MMG75S1706EN MMG100S1706EN MMG150S1706EN MMG50SR120FZ MMG75SR120FZ MMG100SR120FZ MMG100SR060UA MMG50SR120UA MMG75SR120UA MMG100SR120UA MMG100SR060UZA MMG50SR120UZA MMG75SR120UZA MMG100SR120UZA MMG100SR060UK MMG50SR120UK MMG75SR120UK MMG100SR120UK MMG100SR060UZK MMG50SR120UZK MMG75SR120UZK MMG100SR120UZK MMG75S060DE6EN MMG100S060DE6EN MMG100SR060DE MMG150S060DE6EN MMG200S060DE6EN MMG50SR120DE MMG75SR120DE MMG100SR120DE MMG150Q0606HN MMG200Q0606R MMG300Q0606EN MMG300Q0606R MMG400Q0606EN

15 IGT Modules POWER RANGES V Fast Switching Speed Soft Turn-Off Characteristic Welding Machine, Cutting Machine SMPS, UPS, Inverter, Chopper EV A Low Conduction Loss High Short Circuit Capability Plating Power Supply, Induction Heating Solar, Wind Power Servo Drive, Switched Reluctance Drive T C =25 o C unless otherwise noted Package Style Inside Circuit V CES min. I C T C =80 C V CE(sat) typ. P D max. (W) E off T J =125 C (mj) R θjc max. (K/W) GQ 92X45X29.8mm GD 108X62X30.5mm UA MMG100Q1206TN MMG150Q MMG150Q1206HN MMG150Q1206TN MMG200Q MMG200Q1206HN MMG200Q1206TN MMG200DR MMG300D0606EN MMG300D0606R MMG400D0606EN MMG400D0606R MMGD0606EN MMG100D1206HN MMG100D1206TN MMG100DR MMG150D1206HN MMG150D1206TN MMG150DR MMG200D1206HN MMG200D1206TN MMG200DR MMG300D1206HN MMG300D1206TN MMG300DR MMG400D1206HN MMG400D1206TN MMG100D1706EN MMG150D1706EN MMG200D1706EN MMG300D1706EN MMG400D1706EN MMG200DR060UA MMG150DR120UA MMG200DR120UA MMG400D120UA6TN

16 IGT Modules POWER RANGES V Fast Switching Speed Soft Turn-Off Characteristic Welding Machine, Cutting Machine SMPS, UPS, Inverter, Chopper EV A Low Conduction Loss High Short Circuit Capability Plating Power Supply, Induction Heating Solar, Wind Power Servo Drive, Switched Reluctance Drive T C =25 o C unless otherwise noted Package Style Inside Circuit V CES min. I C T C =80 C V CE(sat) typ. P D max. (W) E off T J =125 C (mj) R θjc max. (K/W) GD 108X62X30.5mm GK 108X62X30.5mm GH 107.5X45X17mm UZA UK UZK DE U X X MMG200DR060UZA MMG150DR120UZA MMG200DR120UZA MMG200DR060UK MMG150DR120UK MMG200DR120UK MMG200DR060UZK MMG150DR120UZK MMG200DR120UZK MMG200DR060DE MMG150DR120DE MMG200DR120DE MMG300DR120DE MMG400D120DE6TN MMG400KR060U MMGK060U6EN MMGKR060U MMG800K060U6EN MMG400K120U6HN MMG400K120U6TN MMG400KR120U MMGK120U6HN MMGK120U6TN MMGKR120U MMG800K120U6HN MMG400K170U6EN MMG25H120X6TN MMG50H120X6HN MMG50H120X6TN MMG75H120X6TN MMG15H120X6TN MMG25H120X6TN MMG40H120X6TN MMG50H120X6T

17 IGT Modules POWER RANGES V Fast Switching Speed Soft Turn-Off Characteristic Welding Machine, Cutting Machine SMPS, UPS, Inverter, Chopper EV A Low Conduction Loss High Short Circuit Capability Plating Power Supply, Induction Heating Solar, Wind Power Servo Drive, Switched Reluctance Drive T C =25 o C unless otherwise noted Package Style Inside Circuit V CES min. I C T C =80 C V CE(sat) typ. P D max. (W) E off T J =125 C (mj) R θjc max. (K/W) MMG75H060H6EN NTC MMG50H120H6HN H MMG75H120H6HN GH 107.5X45X17mm NTC MMG150H160UX6TN Id(av) = 150A GH 122X45X17mm GW 122X62X17mm GW 152X62X17mm UX NTC NTC H X X NTC MMG100H160UX MMG150H0606EN MMG200H0606EN MMG300H0606EN MMG400H0606EN MMG75H060H6EN MMG100H060H6EN MMG150H060H6EN MMG200H060H6EN MMG40H120H6HN MMG50H120H6HN MMG75H120H6HN MMG100H120H6HN MMG75W120X6TN MMG100W120X6TN MMG150W120X6TN MMG50W120X6TN MMG75W120X6TN MMG450W0606EN MMGW0606EN MMG225W1206TN MMG300W1206TN MMG450W1206TN MMGW1206TN MMG225W1706EN MMG300W1706EN MMG450W1706EN

18 Thyristor (SCR) Modules POWER RANGES 300-1V Compact Design High locking Voltage High Performance Price Ratio Inverter, Soft-Starter Welding Machine A High Current Capability High Reliability SMPS, UPS AC-DC Circuit T C =25 o C unless otherwise noted Package Style Inside Circuit V RRM V DRM I T(AV) T C =85 C V I TM R θjc (K/W) KJ 38X28.1X12.8mm KA 93X21X30.4mm KS 94X34X30.5mm D UA UK UA UK MMK40J160D MMK25A MMK40A MMK60A MMK90A MMK110A MMK25A160UA MMK40A160UA MMK60A160UA MMK90A160UA MMK110A160UA MMK25A160UK MMK40A160UK MMK60A160UK MMK90A160UK MMK110A160UK MMK130S MMK160S MMK200S MMK130S160UA MMK160S160UA MMK200S160UA MMK130S160UK MMK160S160UK MMK200S160UK

19 + - Thyristor (SCR) Modules POWER RANGES 300-1V A Compact Design High locking Voltage High Performance Price Ratio High Current Capability High Reliability Inverter, Soft-Starter Welding Machine SMPS, UPS AC-DC Circuit W T C =25 o C unless otherwise noted Package Style Inside Circuit V RRM V DRM I T(AV) T C =85 C V I TM R θjc (K/W) MMK25L160H KL 60X32X27mm H MMK35L160H MMK75T160UX MMK100T160UX KT 108X62X26.8mm UX - MMK150T160UX MMK200T160UX MMK75U160UX KU 94X50X22mm UX MMK100U160UX MMK150X030DA KX 108X34X58.2mm DA MMK200X040DA KX 130X35X60mm DA 18

20 POWER RANGES V Compact Design High locking Voltage High Performance Price Ratio Inverter Welding Machine A High Current Capability High Reliability SMPS, UPS AC-DC Circuit T C =25 o C unless otherwise noted Package Style Inside Circuit V RRM I F(AV) T C =85 C I FSM t=10ms T J =45 C V F T J =125 C R θjc (K/W) DA 93X21X30.4mm DS 94X34X30.5mm DK DK U MMD60A MMD90A MMD110A MMD90A MMD110A MMD60A160DK MMD90A160DK MMD110A160DK MMD90A180DK MMD110A180DK MMD130S MMD160S MMD180S MMD200S MMD240S MMD130S MMD160S MMD180S MMD200S MMD130S160DK MMD160S160DK MMD180S160DK MMD200S160DK MMD240S160DK MMD130S180DK MMD160S180DK MMD180S180DK MMD200S180DK MMD200S160U MMD300S160U MMD400S160U DD 108X62X30.5mm U MMD400D160U

21 POWER RANGES V Compact Design High locking Voltage High Performance Price Ratio Inverter Welding Machine A High Current Capability High Reliability SMPS, UPS AC-DC Circuit T C =25 o C unless otherwise noted Package Style Inside Circuit V RRM I d(av) T C =100 C I FSM t=10ms T J =45 C V F T J =125 C R θjc (K/W) MMD70EC160X MMD100EC160X DEC 72X42X17mm X + MMD70EC180X MMD100EC180X MMD70E160X MMD100E160X DE 72X42X30.5mm X + MMD70E180X MMD100E180X MMD70E160X MMD100E160X DE 82X42X22.2mm X + MMD70E180X MMD100E180X MMD150F160X MMD200F160X DF 94X54X30.3mm X + MMD250F160X MMD150F180X MMD200F180X MMD250F180X MMD150F160X MMD200F160X DF 94X54X17mm X + MMD250F160X MMD150F180X MMD200F180X MMD250F180X

22 Outline Drawings ± ±0.5 2-Ø6.5 3-M5 3-M ± ± ± ±0.5 2-Ø ± ± ± ±0.5 FN FS 2-Ø6.5 2-M6 Ø ± ±0.5 2-Ø6.2 2-M6 35.0± ± ± ± ±0.5 FZ FY 30.0±0.5 2-M6 R ± ±0.5 4-M Ø ± ± ± ±0.5 unit : mm FY 21 FJ

23 Outline Drawings 30.5± ± ± M Ø M Ø ± ± ± ± ±0.5 FD 30.2± ±0.5 GJ 2.8x0.5 2-Ø ±.5 3-M5 2-Ø ± ± ± ±0.5 GA GS 2.8x x ± ± M6 4-Ø ± ± ± ± ± ±0.5 3-M ± ± ± ±0.5 3-M ± ± ± ± ± ± ± Ø ± ±0.5 unit : mm GD 22 GQ

24 Outline Drawings (2x)Screws M4x0.7 Length: 8mm (2X) SCREWS M6 X 0.8 LENGTH: 10 mm 1.15±0.03 A2:1 0.65± ± ± ± ±0.5 Ø ± A ± ±0.5 4-Ø6.5 2-M4 2-M ± ± ± ± ± ± Ø ± ± ± ±0.5 GK GH A2:1 1.2± ± ± ±0.5 A 107.7± ± ± ±0.5 4-M ± ± GH GW A Ø4.5 Ø2.5 Ø ± ± ± ± ± M5 50.0± ± ±0.03 A2:1 1.3± ±0.1 3-M5 2-Ø ± ± ± ± ± ±0.5 unit : mm GW 23 KA

25 Outline Drawings M x ± ± ±0.3 6-M5 32.0± ± ±0.3 2-Ø ± ± ± ± ± Ø ±0.5 KS KU 6.3±0.5 6-M6 22.0± ± ± ± ± ± Ø ±0.5 Ø ± ± ± ± ± KT KL Ø1 1.0 Ø ± Ø ± Ø ± ± _ R 2 + R S T 22.0± ± ± ±0.5 G ±0.5 1-M4 62.0± ± ±0.5 unit : mm KX 24 KX

26 Outline Drawings 4-M Ø ± M5 2-Ø ± ± ± ± ± ± ±0.5 KJ DA 30.5± M Ø Ø ± ± ± ± ±0.5 3-M ± ± ± ± ± ±0.5 DS DD ±0.5 5-M ±0.5 5-M ± ± ± ± ± C D E A 2-Ø ± C D E A 2-Ø ± ± ± ±0.5 unit : mm DF 25 DF

27 unit : mm 26 Outline Drawings DH DE 23.0± ± ± ± ±0.5 2-Ø ± ±0.5 5-M5 DE ± ± ± ±0.5 2-Ø ± ± ±0.5 5-M5 DEC 23.0± ± ± ± ±0.5 2-Ø ± ±0.5 5-M5 93.0± ±

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