Technology and Applications of Amorphous Silicon

Transcript

1 Springer Series in Materials Science 37 Technology and Applications of Amorphous Silicon Technology and Applications Bearbeitet von Robert A. Street 1. Auflage Buch. xii, 417 S. Hardcover ISBN Format (B x L): 15,5 x 23,5 cm Gewicht: 1730 g Weitere Fachgebiete > Technik > Elektronik > Halb- und Supraleitertechnologie schnell und portofrei erhältlich bei Die Online-Fachbuchhandlung beck-shop.de ist spezialisiert auf Fachbücher, insbesondere Recht, Steuern und Wirtschaft. Im Sortiment finden Sie alle Medien (Bücher, Zeitschriften, CDs, ebooks, etc.) aller Verlage. Ergänzt wird das Programm durch Services wie Neuerscheinungsdienst oder Zusammenstellungen von Büchern zu Sonderpreisen. Der Shop führt mehr als 8 Millionen Produkte.

2 Contents 1 Introduction... 1 Robert Street 1.1 Overview of the Book Development of Amorphous Silicon Basic Properties of Amorphous Silicon... 3 References Active-Matrix Liquid-Crystal Displays... 7 Toshihisa Tsukada 2.1 Introduction TFTLCD TFT LCD Configuration Pixel Design Design Analysis Scaling Theory of TFT LCD Fabrication of TFT Panels Thin-Film Transistors Hydrogenated Amorphous Silicon Thin-Film Transistors TFT Characteristics Threshold Voltage Shift Simulation of TFT Behavior Two-Terminal Devices Liquid Crystal Physical Constants of Liquid Crystal Twisted-Nematic Cell In-Plane-Switching Cell Super-Twisted Nematic (STN) Cell References Laser Crystallization for Polycrystalline Silicon Device Applications James B. Boyce and Ping Mei 3.1 Introduction Laser Processing of Polysilicon... 96

3 VIII Contents Polysilicon Laser Crystallization Grain Growth Surface Roughening Laser Doping Low-Temperature Poly-Si Devices Device Fabrication CMOS Device Performance Device Leakage Currents Device Stability Integration of a-si and Poly-Si TFTs Development of Hybrid a-si and Poly-Si Devices Hybrid Materials Processing Device Fabrication and Performance Conclusion References Large Area Image Sensor Arrays Robert Street 4.1 Introduction Devices P-i-n Photodiodes Thin Film Transistors Sensor Array Designs Matrix Addressed Readout TFT Addressed, p-i-n Photodiode Arrays High Fill Factor Array Designs TFT Addressed, X-Ray Photoconductor Arrays Diode Addressed Arrays CMOS Sensors Imaging Systems and Their Performance Electronics Electronic Noise X-Ray Detection The Performance of X-Ray Detectors Applications of Large Area Image Sensors Medical X-Ray Imaging Other Radiation Imaging Applications Document Scanning Future Developments References Novel Processing Technology for Macroelectronics S. Wagner, H. Gleskova, J.C. Sturm, and Z. Suo 5.1 Introduction

4 Contents IX 5.2 Resolution and Registration: The Density of Functions Achievable by Printing Printed Toner Masks for Etching and Liftoff Toner Masks via Paper Transfer: TFTs on Glass Foil All Masks Printed Directly: TFTs on Steel Foil Printing Active Materials: Jetting Doped Polymers for Organic Light Emitting Devices Substrates and Encapsulation for Macroelectronic Circuits Plastic Substrate Foil: TFT on Polyimide D Integration on a Foil Substrate: OLED/TFT Pixel Elements on Steel Outlook References Multijunction Solar Cells and Modules Subhendu Guha 6.1 Introduction Deposition Methods Glow-Discharge Deposition Technique Plasma Chemistry and the Growth Process Factors that Influence Film and Cell Quality Single-Junction Cells Cell Structure Cell Characteristics Numerical Modeling Light-Induced Degradation High Efficiency Cells Introduction Multijunction Cell Key Requirements for Obtaining High Efficiency Back Reflector Doped Layer Intrinsic Layers Optimization of the Component Cells and Current Matching Tunnel Junction Top Conducting Oxide Cell and Module Performance Manufacturing Technology Manufacturing Process Production Status and Product Advantage Alternative Technologies and Future Trends References

5 X Contents 7 Multilayer Color Detectors Fabrizio Palma 7.1 Introduction Applications of a-si:h Color Sensors Optical Properties of Amorphous Silicon Optical Properties of Amorphous Silicon Alloys Optical Design of Layered a-si:h Structures Two-Color Sensors Steady State and Transient Operation SPICE Model of the Two Color Detector Three-Color Sensors Three Color Discrimination with Two Electrical Terminals Adjustable Threshold Three Color Detector (ATCD) Three Color Detectors in the Time Integration Regime Mechanism of Autopolarization of the Stacked Cells a-si:h Based UV Sensors Structure and Operation of the UV Detector a-si:h Based IR Sensors IR Detection by Differential Photo-Capacitance References Thin Film Position Sensitive Detectors: From 1D to 3D Applications Rodrigo Martins and Elvira Fortunato 8.1 Introduction and Historical Background Why Use Amorphous Silicon to Produce Position Sensitive Detectors? Principles of Operation of 1D and 2D PSD The Different Types of PSD Devices That Can Be Produced Different Types of a-si:h TFPSD and the Production Processes Used Physical Model for the Lateral Photo-effect in a-si:h p-i-n 1D and 2D TFPSD Introduction General Description of the 1D Theoretical Model Role of the Recombination Losses for the Fall-Off Parameter Static Behaviour of E y and φ y Role of ρ s and ρ sd for the Device Detection Limits, Linearity, and Spatial Resolution Static Distribution of the Lateral Current Extension of the Theoretical 1D Model to the 2D Case Determination of the Transient Response Time of the TFPSD Static and Dynamic Detection Limits

6 Contents XI Static Detection Limits of 1D TFPSD Linearity and Spatial Resolution of 1D TFPSD Position Response to Multiple Light Beams Static Predicted and Experimental Performance of the 2D TFPSD Device Dynamic Performance of the 1D and 2D TFPSD Response Time of the TFPSD Detection of Light Signals with Different Wavelengths Characteristics of the a-si:h p-i-n Structures Used to Produce the TFPSD J V Curves Dependence of the Saturation Current of the Device on T Spectral Response and Detectivity Peripherals for 1D and 2D TFPSD Signal Processing Optical Methods Peripherals for Signal Processing Simulated and Experimental Data in 2D Optical Inspection Systems with TFPSD Detector Linear Array of Thin Film Position Sensitive Detector (LTFPSD) Principles of the Optical Methods Used Positional Resolution of the Array Hardware to Control Arrays of Multiple 1D Sensors Bandwidth Requirements for the Preamplifiers Used in the Hardware Control Unit of the LTFPSD Summary and Future Outlook References Symbols and Abbreviations Subject Index