The effect of temperature and heating period on optical properties of ZnO nano layers deposited on LiNbO 3

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1 - ( ) LiNbO ( 89/1/1 : - 89/1/14 : ) ( Zn) ( ZnO) (k) (R) (T) ( 800 o C).. ZnO 800 o C.. : The effect of temperature and heating period on optical properties of ZnO nano layers deposited on LiNbO A. Zendehnam, M. Shirazi and S. Doulatshah Thin Film Laboratory, Physics Department, Faculty of Science, Arak University, Arak, Iran Abstract In this work, the optical properties of ZnO thin films were investigated experimentally. Zinc was sputtered by the magnetron sputtering method on the LiNbO crystal (as substrate), followed by a thermal oxidation at 450 o C of the obtained ZnO films. The variations of the transmittance, reflectance, and extinction coefficient were measured for temperatures ( o C) and different periods of heating (15-10min) which were employed to study their effects on the optical characteristics of the ZnO samples. The optical band gap energy was determined and it showed reduction with temperature and an increase at 800 o C with period of heating. Keywords: ZnO Thin Films, LiNbO, Optical Properties, Magnetron Sputtering. of corresponding author: A-zendehnam@araku.ac.ir

2 ( ) LiNbO.[ 5] TM (Zn).. ) IR (70nm.[6].[6].[7 8] ( -) (T < 900 o C ) Li O.[7 8].[9] ZnO Zn -900 o C Zn [ 7] 800 ZnO.[10] (RF) DC...[1 ] o C..[] 110 o C. (IR).[] (Zn,Ti).[4] (TM,TE).[4] (T >1000 o C ). ( 6-8) Li O

3 ( ) LiNbO ( ) ((1) ). ) (.[1] Zn o C ) (Zn) (. 60 ( o C). 15 Zn ( 10-15) 800 o C. 150 ZnO.[1] (RBS) (A) (T) Camspec model ) (M50.. ZnO..1 (mbar) (A) (V) (mbar) nm/s DC. ZnO. Zn (x-cut) Foctek 99/998 0, mm² Hind High Vacuum (H.H.V) 1"MSPT. mm 1/5. 99/ mbar. (0. 1) 10 1 mbar , -1 A. 600 K 00K K [11] , ,95 1.Ultrasonic bath

4 ( ) LiNbO Zn.. Zn 800 o C ZnNb O 6 ( 4 ). X ZnNb O 6 (XRD) (T > 700 o C) [15]. :[16] (α) 1 T0 α = ln( ) (1) t T T T 0 t. ZnO (α) (λ) k λα = 4π. o C) ( 800 : [16] ( ) () ZnO ZnO 550 o C ZnO (,ev) ZnO..[14] 800 o C Zn Zn 800 o C. 1..1

5 ( ) LiNbO 800 o C.( 15 ) ( 6) 800 o C. 6 Zn. αh ν = B( hν ) E g n.[16] () B α hν n. E g. 1/ hν ZnO (αhν) 7 8. E g E g hν (αhν)....4 o C) (800 (k). 5 Zn 800 o C..6 (800 o C).5

6 ( ) LiNbO.[ ]. ZnO.[14] temperature( 0 c) Eg (ev). (αhν).7. o 800 C Time (min) LiNbO Eg (ev) ZnO. Zn (/ ev)... (αhν).8 (800 o C) /95 4 ) 450 o C. ([] ZnO /5 ZnO E g. [16 17] (, ev) Zn 700 o C. /19 E g 800 o C 15 ) ( 800 o C Zn 10 (/875ev).

7 ( ) LiNbO 1. K. Okamoto, Fundamentals of optical waveguides, 000 by academic press. New York.. L. Wooten, K. M. Kissa, A. Yi, J. Murphy and D.A. Lafaw,A review of lithium niobate modulators for fiber-optic communications systems, IEEE Journal of Selected Topics in Quantum Electronics, 6(000) Y. Kuz'minov, Lithium Niobate Crystals: Physico-chemical Aspects of Technology, Cambridge International Science Publishing, R. Nevadao and G. Lifante, Low-loss, damageresistant optical waveguides in Zn-diffused LiNbO by a two-step procedure, Applied Physics A, 7(001) W. Gao and Z. Li, Zno thin films produced by magnetron sputtering, International Ceramics, 0(004) B. Herreros and G. Lifante, LiNbO optical waveguides by Zn diffusion from vapor phase, Applied. Physics. Letters, 66:1(1995) R. Nevadao, C. Seda, F. Segato, F. Caccavale, A. Kling,J.C. Soares, E. Cantelar, F. Cysso and G. Lifante, Compositional characterization of Zn-diffused lithium niobate waveguides, Applied Physic B,7(001) T. Volk, B. Maximov, T. Chernaya, N. Rubinia, M. Wohelecke and V.Simomov, Photorefractive properties of LiNbO :Zn crystals related to the defect structure, Applied Physic B, 7(001) L. Arizmendi, Photonic applications of lithium niobate crystals, physica status solidi (a), 01()(004) T. Suhar, M. Fujimura, M. Uemvkai,Waveguide nonlinear-optic wavelength coversion devices and their applications, In photonics based on wavelength integration and manipulation, IPAP Books, (005) H. Yamamoto, N. Saiga and K. Nishimori, ZnO thin films deposited on various LiNbO substrates by RF-sputtering, Applied Surface Science, 169(001) A. Zendehnam, M. Shirazi, S. Doulatshah and M. Sadat, Effect of temperature and period of post-annealing on the optical properties of ZnO thin films, Armenian Journal of Physics, (4)(010) L. Aghli-Moghadam, A. Baghizadeh, G. Nabiyoun, A. Farashiani and A. Zendehnam, Zn-diffused LiNbO waveguides fabricated by DC magnetron sputtering, Applied physica,97(009) Y. Wang, H. Wang, S. Liu, H. Liu, S. Zhou, Y. Hang, J. Xu, J. Ye, Sh. Gu and R. Zhang, MOCVD growth and properties of ZnO thin films on LiNbO substrates, Journal of Crystal Growth, 77(005) A. zendehnam, M. Shirazi, M. Sadat and L. Aghli-Moghadam, Annealing effect on structural and optical properties of ZnO thin films sputtered on LiNbO substrate, World Applied Sciences Journal 10(1),(010) N. Ekem, S. Korkmaz, S. Pat, M.Z. Balbog, E.N. Cetin and M. Ozmumcu,Some physical properties of ZnO thin films prepared by RF sputtering technique, International Journal of Hydrogen Energy.4(009) J. S. Welling, N. B. Chaure, S. N. Heavens and I. M. Dharmadasa, Characterization of electro deposited and sputtered Zinc oxide, Journal of Thin Solid Film, 516(008) G. H. Lee, Optical properties of ZnO thin films on LiNbO and LiTaO substrates grown by pulsed laser deposition, Solid state communicate, 18(00)51-54.

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