TR IBOLO GY N ov, T EER Coating L td, U K) M H 25 [4 ] ( [6 ] ). (SEM ),. V G %. PS2168

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1 23 6 V o l 23, N o TR IBOLO GY N ov, , 1, 1, YAN G Sh i2cai 2 (1., ; 2. T EER Coating L td, U K) :,,,. : sp 2 ;, ; C r,,. : ; ; : TH : A : (2003) ,.,, (DL C) [1 3 ].,DL C, ;, DL C,. DL C. sp 2 [4 ],,.,, 2, 4 sp 2,. 1 M 2 (W 6M o5c r4v 2),, 63 66H R C, R a= Λm. T eer, (C r) 3 (G),. C r, C r C r. T eer [5 ] 4 C r. M H 25,, N. (JP252 ) Σc ( [6 ] ). (SEM ),. V G9000 C r. BDW 21 2, <4. 75 mm GC r15 ; : 200 mm gs, 10 N, 50%. (). PS2168, <10 mm, 0. 5 M H 2SO 4, : ;. : ; : g, e2m ail: jw he@m ail. xjtu. edu. cn. :,, 1933,,, X.

2 mv gm in R am an XRD SEM [ 3 (a) ]; F ig 1 M icro2r am an spectrum of coating 1 R am an F ig 2 XRD pattern of coating 2 XRD (a) M o rpho logy (b) C ro ss2section F ig 3 SEM mo rpho logies of the coating surface and cro ss2section 3 SEM [ 3 (b) ]; C r,. T eer M icro2r am an, sp 3 DL C, sp 2, [5 ] C r., C r, CL C r.,. C r, C r, C r, C + C r. (L c ), L c, [7 ]. Σc [8 ]., CH CL L c 100 N, CD C L c ; 4 Σc 500 M Pa, CH CD CL Σc 550 M Pa.. C r, CC rx [6, ]

3 6 : Table 1 Coating th ickness and hardness inden tation depth Samp le CH (H igh ch rom ium content) CD (Double layers) CL (Low chrom ium content) C (Pure carbon) T h icknessgλm H ardnessggpa Indentation dep thgλm D ep thgthickness L cgn ΣcgM Pa ,. C r, C r ; C r,, C r. CD C r., C r, 2 Table 2 Tr ibolog ical property of coatings CH CD CL C F riction coefficient Λ W ear rate W R g m 3 (N m ) GC r15 F ig 4 C r content of coatings vṡ dep th 4C r C r 2.,,. 1, 1g5 1g4,, , C r. C r, C r 0. 22; CD CL C r,, C r (50% ) ( m 3 gm N ) ; C r, C r F ig 5 F riction coefficient under different loads vs. sliding distance 5 GC r15.,.,,., [9 ].,. 6 CL 1C r18n i9t i 0. 5M H 2SO 4,

4 C r,,. b., ;. : F ig 6 Po larization curves of the CL carbon coating and stainless steel 6 1C r18n i9t i.,,,., [10 ]., ΛgH, W R ΛgH (Λ, H ) : W R = C Λ + C 0. (1) H : C 0, C..,,,.,,,.,,,. 3 a.,,. C r, ; [ 1 ] Klages C P, F ryda M, M atth e T, et al. D iamond coatings and cbn coatings fo r too ls[j ]. International Journal of Refracto ry M etals & H ard M aterials, 1998, 16 (3) : [ 2 ] Zhu Hong ( ), L iu X ianghuai (), Ren Congxin ( ), et al. T ribo logical p roperties of diamond like carbon film p repared by low energy ion beam assisted depo sition w ith a single ion source ( ) [J ]. T ribo logy ( ), 1995, 15 (2) : [ 3 ] L i L iuhe (), X ia L ifang (), Zhang H aiquan ( ), et al. T ribo logical p roperties and the current state of tri2 bo logical investigation of diamond2like carbon film s ( ) [ J ]. ), 2001, 21 (1) : T ribo logy ( [ 4 ] Yang S, L i X, Renevier N M, et al. T ribo logical p roperties and w ear m echanism of sputtered CgC r coating[j ]. Surface & Coatings Techno logy, 2001, : [ 5 ] T eer D G, Cam ino D, Jones A H S [ S ]. U K Patent A pp l, GB , [ 6 ] Cam ino D, Jones A H S, M ercs D, et al. H igh perfo rm ance sputtered carbon coatings fo r w ear resistant app lications [J ]. V acuum, 1999, 52 (122) : [ 7 ] V alli J. A review of adhesion test m ethods fo r th in hard coat2 ing[j ]. Journal of V acuum Science and Techno logy, 1988, 6: [ 8 ] Zhu X iaodong (), H uang H e ( ), H u N aisai ( ), et al. M easuring bonding strength of th in hard film s by ro lling contact fatigue m ethod ( ) [ J ]. A cta M etallurgica Sinica ( ), 1999, 35 (5) : [ 9 ] E rdem A, B indal C, Fenske G R, et al. Characterization of transfer layers fo rm ing on surfaces sliding against diamond2 like carbon[j ]. Surface & Coatings Techno logy, 1996, 86287: [10 ]. [M ]. :, 1985.

5 6 : 467 Tr ibolog ical Properties of Graph ite-l ike Carbon Coating Prepared by Unbalanced M agnetron Sputter ing M ethod FU Yong2hu i 1, ZHU X iao2dong 1, H E J ia2w en 1, YAN G Sh i2cai 2 (1. S tate K ey L ab f or M echanical B ehav ior of M aterials, X i an J iaotong U niversity, X i an , Ch ina; 2. T E ER Coating L td., U K ) Abstract: D ifferen t k inds of graph ite2like carbon coating w ere depo sited on h igh2speed steel W 6M o5c r4v 2 u sing clo sed field unbalanced m agnetron sputtering depo sition techn ique. T he bonding strength and hardness of the coatings w ere m easu red on a con tact2fatigue tester and a m icro2hardness m eter. T he chem ical p roper2 ties and phase compo sition s of the coatings w ere analyzed by m ean s of R am an spectrom etry and X2ray diffrac2 tion. T he m icro structu res of the coatings w ere investigated on a scann ing electron m icro scope, w h ile the tri2 bo logical p roperties of the coatings sliding again st SA E52100 steel ball w ere evaluated on a ball2on2disc test rig. It w as found that the graph ite2like coatings coatings w ere characterized by sp 2 hyb ridization and had h igh hardness, low friction coefficien t, very sm all w ear rate, and chem ical inertness. T he friction coefficien t de2 creased w ith increasing app lied load and the w ear rate w as p ropo rtional to the ratio of ΛgH w here Λ referred to the friction coefficien t and H to the hardness of the coatings. T he inco rpo ration of alloy elem en t C r led to soften ing of the coatings and con tribu ted to increasing the bonding strength of the coatings as w ell, w h ich in tu rn accoun ted fo r the imp roved friction2reducing and an tiw ear ab ilities of the coatings. Key words: unbalanced m agnetron sputtering depo sition; h igh hardness carbon coating; tribo logical p roper2 ties Author: H E J ia2w en, m ale, bo rn in 1933, P rofesso r, e2m ail: jw he@m ail. x jtu. edu. cn

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